SILICON ELECTRODE ASSEMBLY SURFACE DECONTAMINATION BY ACIDIC SOLUTION
摘要
<p>Methods for cleaning silicon surfaces of electrode assemblies by efficiently removing contaminants from the silicon surfaces without discoloring the silicon surfaces using an acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and balance deionized water.</p>
申请公布号
WO2006071535(A2)
申请公布日期
2006.07.06
申请号
WO2005US45273
申请日期
2005.12.14
申请人
LAM RESEARCH CORPORATION;SHIH, HONG;HUANG, TUOCHUAN;ZHOU, CHUNHONG