| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation equipment which irradiates an irradiation target, arranged on a tray with electron beams for its heating, while conveying together with the tray, can heat the target quickly, surely and efficiently and can easily treat the tray, without hindering the transport of the tray and resultingly raise productivity of the irradiating targets. SOLUTION: The electron beam irradiation equipment 10 comprises an electron beam irradiation chamber 2 placed with an electron beam irradiation equipment body 1, a tray 3 for placing an irradiation target W, a conveyer 4 transporting the tray 3 from the inlet 21 of the irradiation chamber 2 through an electron beam irradiation region A to the outlet 23, an electrical heater 5 placed on the tray 3 and connected with a receiving member 51, and a power supply rail 6 slide-contacting the receiving member 51 and extending along the tray transport direction. COPYRIGHT: (C)2006,JPO&NCIPI
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