| 摘要 |
A FLUID EJECTION DEVICE, SUCH AS FOR AN INK JET PRINTER OR THE LIKE, HAVING INCREASED INCREASING NOZZLE DENSITY.A THROUGH-HOLE (15) IS PROVIDED IN A GLASS SUBSTRATE (18) TO WHICH A SECOND SILICON SUBSTRATE (19) IS DIRECTLY BONDED TO FORM AN INK OUTLET (14). THE FIRST SILICON SUBSTRATE (17) IS ETCHED TO FORM A PRESSURE CHAMBER (12), AN INK CHANNEL (13) AND AN INK INLET (16), AND BONDED DIRECTLY TO THE GLASS SUBSTRATE (18). A PIEZOELECTRIC THIN FILM (11), HAVING A CONDUCTIVE, ELASTIC BODY (20), IS BONDED TO THE FIRST SUBSTRATE COVERING THE PRESSURE CHAMBER (12). THE ELASTIC BODY (20) IS SANDWICHED BETWEEN THE PIEZOELECTRIC THIN FILM (11) AND A RESIN LAYER (25). THE SECOND SUBSTRATE (19) HAS A THICKNESS OF LESS THAN ABOUT 0.8 MM IN A RANGE OF THICKNESS COMPRISING ABOUT 1.2 TO ABOUT 1.9 TIMES (RG-RS), WHEREIN RG IS THE DIAMETER OF THE WIDE END OF THE THROUGH-HOLE (15) AND RS IS THE DIAMETER OF THE NARROW END OF THE THROUGH-HOLE (15).(FIGURE 1)
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