摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm valve capable of preventing the concentration of stress on the neighborhood of a boundary between a valve element portion of a diaphragm and a film portion, and improving durability of the diaphragm. SOLUTION: This diaphragm valve 1 comprises a diaphragm valve element 20 having the valve element portion 21 kept into contact with a valve seat 13, the film portion 22 expanding to the outside from the valve element portion 21, and a fixing portion 23 formed on an outer peripheral edge of the film portion 22. As the film portion 22 is provided with a vertical portion 22a connected with the valve element portion 21 and formed in the vertical direction, a horizontal portion 22c connected with the fixing portion 23 and formed in the horizontal direction, and a connecting portion 22b having the circular arc-shaped cross section (upward projecting shape) for connecting the vertical portion 22a and the horizontal portion 22c, the vertical portion 22a is constantly kept into contact with an outer peripheral face of a backup 40. COPYRIGHT: (C)2006,JPO&NCIPI
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