摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of forming a uniform optical film with good throughput, good reproducibility and simplicity and optical components having the optical film. <P>SOLUTION: The method for forming the optical film on a substrate 2 has a process of sucking a coating liquid 3 having optical film components by a carrier gas 4 of high pressure by evacuation and discharging the spray of the obtained coating liquid particulates and the carrier gas 4 from a nozzle 11 onto a substrate 2, then applying a drying and curing treatment, in which the discharge amount of the coating liquid 3 is 1 to 10 mL/min; the discharge amount of the carrier gas 4 is 1 to 10 L/min and the error in the discharge amount of the coating liquid 3 is ≤0.1 mL/min. <P>COPYRIGHT: (C)2006,JPO&NCIPI |