发明名称 Leak detector
摘要 A leak detector comprises a high vacuum envelope connected with a vacuum pump to bring the vacuum envelope to a pressure sensibly lower than ambient pressure. At least a portion of the envelope is separated from an external environment through a quartz membrane associated with an electrical resistor, which heats the membrane to a sufficient temperature in order to make it permeable to a corresponding test gas (in particular, helium). In operation, an electronic control unit detects variations in the current absorbed by the vacuum pump and consequently signals the test gas diffusion into the chamber and hence the existence of a leak. A sampling line with a sampling pump disposed therein is connected to a probe for the intake of gas directed to expose to the membrane. The gas is discharged to the outside through a discharge line. A system for switching between the gas intake and exhaust is provided, in order to quickly eliminates any test gas trace from said detector. Purging cycle actuation is provided manually or automatically.
申请公布号 US7062954(B2) 申请公布日期 2006.06.20
申请号 US20050034123 申请日期 2005.01.12
申请人 VARIAN, S.P.A. 发明人 VITTOZZI SANDRO;CARBONERI ROBERTO
分类号 G01M3/20;G01M3/04 主分类号 G01M3/20
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