| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system which can process a substrate efficiently. SOLUTION: The processing system 1 which processes the substrate W includes a back processing substrate processing device 5 which holds, bundles up and processes a plurality of substrates W by a retention member, and sheet type substrate processing devices 7A and 7B which contains one substrate W at a time and which perform different processing from a batch type substrate processing device 5. Further, the processing system 1 includes a standby part 44 which holds the plurality of substrates W and makes them stand by, a substrate delivery device 43 which conveys the substrate W between the standby part 44 and the retention member, and a sheet type transport device 9 which conveys one substrate W at a time between the standby part 44 and the sheet type substrate processing devices 7A and 7B. COPYRIGHT: (C)2006,JPO&NCIPI
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