| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection device capable of detecting a dent defect on a surface of a substrate, without being erroneously determined. <P>SOLUTION: A computing part 130 for realizing this visual inspection device for the substrate of the present invention includes a multiresolution image preparing part 131 for generating an image of a plurality of resolutions, a preprocessing part 132 executing predetermined band-path filter processing, a density gradient calculation part 133 for executing Sobel filter processing to generate a density gradient image data, a binarization labeling part 134 for executing labeling processing to specify an area, a feature amount calculation part 135 for calculating a feature amount in the area, a dent defect determination part 136 for determining the presence of the dent defect based on the feature amount, a strength calculation part 137 for calculating strength of the dent defect, and a substrate determination part 139 for determining whether the inspected substrate is required to be corrected or not. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
