Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block

摘要

An optical micro sensor ( 1 ) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor ( 1 ) is fabricated using MEMS technology and is adapted to receive an optical fibre ( 40 ) which communicates radiation to and from the micro sensor ( 1 ). The sensor ( 1 ) has an environmentally-sensitive element ( 4 ) which modifies the incident radiation communicated by the optical fibre ( 40 ). The modified radiation is communicated back along the optical fibre ( 40 ) and provides information regarding the environmental conditions surrounding the sensor ( 1 ). The pressure sensor is provided with a Fabry Perot cavity ( 3 ) in a first surface of a silicon wafer ( 2 ). The cavity is covered by a reflector at the environmentally-sensitive element ( 4 ). The diameter of the channel ( 7 ) holding the optical fibre ( 40 ) is greater than the diameter of the cavity. ( 3 ). The temperature sensor is provided with luminescent material at the element ( 4 ). Also, a method of securing an optical fibre to a silicon block is claimed.