| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve delivery efficiency and to prevent incorrect delivery by managing delivery with an RFID tag even for a photomask using a radio wave absorbing substance. <P>SOLUTION: A product control data in a first RFID tag 15 stuck to a pellicle frame 13 of a photomask 10 is verified with a product control data in a second RFID tag 45 stuck on a product container 4 housing the photomask. Then the product control data in the second RFID tag is verified with a product control data in a third RFID tag stuck on a package box 62 packaging the product container. Thus, even when radio waves of the first RFID tag are damped too weak by a radio wave absorbing substance of the photomask that the radio waves can not be received outside the package box, the second RFID tag preliminarily verified with the first RFID tag can be verified with the third RFID tag outside the package box. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
