| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor improved in temperature characteristic by suppressing fluctuation of offset voltage. <P>SOLUTION: This acceleration sensor comprises a weight part formed in a center part of a semiconductor substrate, a frame part formed on the peripheral part of the weight part, a beam part or a diaphragm part connecting the weight part to the frame part, a detecting element formed on the beam part or the diaphragm part to detect distortion of the beam part or diaphragm part corresponding to an acceleration applied, and a lead formed on the beam part or diaphragm part to guide the detection output of the detecting element to a pad provided on the frame part. Further, a dummy lead consisting of a plurality of dot patterns electrically independent from at least the lead formed on the beam part or the diaphragm part is formed on the beam part or the diaphragm. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
