APPARATUS FOR TRANSFERRING A SUBSTRATE,申请号KR20040094892-传众专利搜索

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发明名称	APPARATUS FOR TRANSFERRING A SUBSTRATE
摘要
申请公布号	KR20060055749(A)	申请公布日期	2006.05.24
申请号	KR20040094892	申请日期	2004.11.19
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	DO, BYUNG HUN
分类号	H01L21/68;H01L21/02	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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