| 摘要 |
A microfocus X-ray tube is provided, and comprises a head that during operation of the X-ray tube faces an object that is to be inspected. The head has an outer surface with a cross-section that tapers toward a free end of the head. A target is disposed on or in the head. A mechanism is provided for forming an electron beam adapted to bombard the target, and forms the electron beam such that the X-ray tube has a focus with a diameter of <=200 mum. The target has an outer surface with a cross-section that tapers toward an end of the target that during the operation of the X-ray tube faces an object that is to be inspected. A collimator can be provided for the target and also has an outer surface with a cross-section that tapers toward an end of the collimator that during operation of the X-ray tube faces an object that is to be inspected.
|
