METHOD AND APPARATUS FOR REMOVING IMPURITIES, AND USE OF A CLEANING AGENT

摘要

In summary, the present invention comprises a method for removing impurities from a surface (14) of an object (12), comprising the steps of: providing a cleaning material (22); applying the cleaning material (22) as a solid to at least part of the surface (14) of the object (12) to be cleaned; introducing radiation (24), the radiant energy of the radiation (24) being at least partially absorbed by the object (12) and/or the cleaning material (22), in such a manner that the cleaning material (22) is heated and substantially sublimes into the gaseous state (S; L), and an apparatus for removing impurities from a surface of an object, as well as the use of a cleaning agent to remove impurities from a surface of an object.