| 发明名称 |
SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING THE SAME |
| 摘要 |
A semiconductor device includes a plurality of elements formed on a semiconductor substrate and an interlayer dielectric formed on the semiconductor substrate to fill spaces between adjacent ones of the plurality of elements. The concentration of an impurity in the interlayer dielectric is nonuniform in a direction along the thickness of the interlayer dielectric. |
| 申请公布号 |
KR20060044464(A) |
申请公布日期 |
2006.05.16 |
| 申请号 |
KR20050023080 |
申请日期 |
2005.03.21 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TAKAMORI YOSHINORI |
| 分类号 |
H01L21/31;C23C16/00;C23C16/40;H01L21/316;H01L21/768;H01L23/31;H01L23/52;H01L23/58 |
主分类号 |
H01L21/31 |
| 代理机构 |
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代理人 |
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