| 摘要 |
To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section (281) stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section (281) outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section (252) performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section (281), and outputs, to an A/D converter (154), a sensor output signal (153) having a sensor output voltage (V) after the sensor sensitivity adjustment.
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