| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of a plate-type substrate which can surely form a straight orientation flat, even if the width of cutting portion is narrow, when forming orientation flat. SOLUTION: In the manufacturing method of the plate-type substrate, a disk type substrate 5, having an orientation flat 4 cut in straight at a circumferential portion, is cut from a base material 1. After having locally heated a plate type base material 1 consisting of brittle material, the base material 1 is cut by locally cooling the locally heated portion. After having formed an initial crack 2 in the base material 1, the base material 1 is cut into a circular form by arranging the initial crack 2 as a starting point. The orientation flat 4 is formed by cutting a portion of a circular cutting portion 3, including the initial crack 2, in such a state that the circular cutting portion 3 will not separate from the base material 1. COPYRIGHT: (C)2006,JPO&NCIPI
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