Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion,申请号DE19976033381T-传众专利搜索

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发明名称	Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion
摘要
申请公布号	DE69733381(T2)	申请公布日期	2006.04.27
申请号	DE19976033381T	申请日期	1997.06.03
申请人	APPLIED MATERIALS, INC.	发明人	BAHL, SUNEET
分类号	C30B31/14;H01L21/205;C23C16/04;C23C16/48;C30B25/10;C30B31/12;H01L21/00;H01L21/31	主分类号	C30B31/14
代理机构		代理人
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