SERVICE ACTIVITY MANAGEMENT SYSTEM AND METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

An activity management system, and a method of using thereof, is described for a service process in semiconductor manufacturing. The activity management system includes a data collection system configured to receive service activity data associated with at least one service component and a service operator, and relate the service activity data with at least one service account. Additionally, the activity management system includes a data storage system coupled to the data collection system and configured to store the service activity data. Furthermore, the activity management system includes a service action system coupled to the data collection system and the data storage system, and configured to perform at least one service function including service component repair, service component start-up, service component preventive maintenance, service component cleaning, service component revision (e.g., a field change notice), a service component enhancement (e.g., a continuous improvement notice), service component de­installation, a customer action plan, a project action plan, and service education.