| 摘要 |
PROBLEM TO BE SOLVED: To provide a work holder, which suppresses the formation of breaks and cracks of works such as a crystal plate, a ceramic plate, or the like and has high reliability. SOLUTION: A first work holding plate 1 has a rectangular recessed accommodation part 11 for accommodating a plurality of rectangular works W, window parts 12 through which part of the accommodation recessed part passes, and through holes on the corner of the accommodation recessed part, which is larger than the corner. A second work holding plate 2 has second windows formed at positions corresponding to the holes. COPYRIGHT: (C)2006,JPO&NCIPI
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