| 摘要 |
PROBLEM TO BE SOLVED: To improve a quality factor Q in a piezoelectric thin film resonator. SOLUTION: An FBAR resonator structure comprises two electrodes sandwiching a piezoelectric material, and the intersection of the two conducting electrodes defines the active area of the acoustic resonator. The active area is divided into concentric areas (perimeters, namely, into a frame region and a central region). An annulus is added to one of the two conducting electrodes, thereby improving electric performance from a point of view of Q. COPYRIGHT: (C)2006,JPO&NCIPI
|
