发明名称 |
System and method for controlling wavelength of a laser beam |
摘要 |
A system of controlling a wavelength of a laser beam is provided. The system comprises a stage for supporting a wafer, an optical convergence unit for emitting the laser beam moving in an optical path toward the stage, and a specific wavelength detecting sensor. The specific wavelength detecting sensor is disposed between the optical convergence unit and the stage. It includes a laser beam absorbing structural body for absorbing a specific wavelength of the laser beam emitting toward the stage. A wavelength controlling unit for selectively controlling the wavelength of the laser beam is also provided.
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申请公布号 |
US2006083274(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
US20050223195 |
申请日期 |
2005.09.08 |
申请人 |
PARK YOUNG-HO;GWAG SI-YEONG;WON YOO-KEUN |
发明人 |
PARK YOUNG-HO;GWAG SI-YEONG;WON YOO-KEUN |
分类号 |
H01S3/13 |
主分类号 |
H01S3/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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