| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic device which is enhanced in its property and its production method. <P>SOLUTION: In the production method of the electronic device (a piezoelectric device) 74, an outer rim R1 of a piezoelectric body film 52A formed on an electrode film 46A of a layered body 60 is made inside of an outer rim R2 of the electrode film 46A. Therefore, when removing a Si single crystal substrate 14 from a multilayered substrate 61, if an etching solution is penetrated between a polyimide 72 and the laminate 60, the etching solution detours around the electrode film 46A before the etching solution reaches the piezoelectric body film 52A. That is, a route A reaching the etching solution into the piezoelectric body film 52A is extended significantly by the electrode film 46A. Then, the etching solution can reach hardly into the piezoelectric body film 52A at the production method of the piezoelectric device 74. Accordingly, an improvemenmt of the property of the produced piezoelectric device 74 is realized by suppressing significantly the state in which the piezoelectric body film 52A is dissolved. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
