发明名称 Magnetic recording medium and method for production thereof
摘要 A reactive sputtering method is provided for producing a magnetic layer in a stable manner with good reproducibility. One aspect of the invention is to form a magnetic layer for a magnetic recording medium without adversely affecting magnetic properties. Carbon oxide gas is added at the time of reactive sputtering. In one embodiment, a method for producing a magnetic recording medium includes forming at least a soft magnetic layer and a magnetic layer above a substrate, wherein forming said magnetic layer includes sputtering with argon gas and carbon oxide gas.
申请公布号 US2006076233(A1) 申请公布日期 2006.04.13
申请号 US20050246344 申请日期 2005.10.06
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 HONDA YOSHINORI;TAKEKUMA IKUKO;TAMAI ICHIRO
分类号 C23C14/00 主分类号 C23C14/00
代理机构 代理人
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