Polierkissen mit Rillenmuster zur Verwendung in einer chemisch-mechanischen Poliervorrichtung,申请号DE1998630944T-传众专利搜索

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发明名称	Polierkissen mit Rillenmuster zur Verwendung in einer chemisch-mechanischen Poliervorrichtung
摘要
申请公布号	DE69830944(T2)	申请公布日期	2006.04.13
申请号	DE1998630944T	申请日期	1998.05.12
申请人	APPLIED MATERIALS, INC.	发明人	OSTERHELD, TOM;KO, SEN-HOU;BENNETT, DOYLE EDWARD;REDEKER, FRED C.;ADDIEGO, GINETTO
分类号	B24D13/14;B24B37/04;B24B37/26;H01L21/304	主分类号	B24D13/14
代理机构		代理人
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