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发明名称
Katoptrisches Projektionssystem, Belichtungsvorrichtung und Herstellungsprozess mit deren Verwendung
摘要
申请公布号
DE60303173(D1)
申请公布日期
2006.04.06
申请号
DE20036003173
申请日期
2003.02.05
申请人
CANON K.K., TOKIO/TOKYO
发明人
TERASAWA, CHIAKI
分类号
G02B17/00;G02B17/06;G02B13/14;G02B27/18;G03F7/20;H01L21/027
主分类号
G02B17/00
代理机构
代理人
主权项
地址
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