| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of improving the characteristics of a piezoelectric layer constituting the piezoelectric element with the characteristics of the piezoelectric layer being stabilized, also to provide a liquid injection head using the piezoelectric element and its manufacturing method, and further to provide a liquid injection apparatus using the piezoelectric element. <P>SOLUTION: There are provided a lower electrode formed via a diaphragm, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer. The surface roughness Ra of the lower electrode ranges from 0.05 to 2 nm. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
