发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device comprising a multi Fin-FET structure capable of suppressing short channel effects, controlling a threshold voltage, driving a high current, and operating in a high-speed comprises a source region and a drain region disposed on a semiconductor substrate, a plurality of fins interconnecting the source region and drain region, a first gate electrode disposed on the semiconductor substrate and to one side face of each fin, a second gate electrode disposed on the semiconductor substrate and to the other side face of the fin to face the first gate electrode, and separated from the first gate electrode, a plurality of first pad electrodes connected to respective first gate electrode, a first wiring interconnecting the plurality of first pad electrodes, a plurality of second pad electrodes connected to respective second gate electrode, and a second wiring interconnecting the plurality of second pad electrodes.
申请公布号 US2006073647(A1) 申请公布日期 2006.04.06
申请号 US20040005477 申请日期 2004.12.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INABA SATOSHI
分类号 H01L21/84;H01L21/336;H01L21/8234 主分类号 H01L21/84
代理机构 代理人
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