MOTION CONTROL DEVICE FOR WIRE BONDER BONDHEAD

摘要

A motion control device for controlling rotary and linear motion which includes a first linear actuator (120) having a first fixed member and a first moveable drive member (132), the first moveable drive member being driven for motion relative to the first fixed member along a first longitudinal axis. The device also includes a second linear actuator (120) having a second fixed member and a second moveable drive member, the second movable drive member being driven for motion relative to the second fixed member along a second longitudinal axis. A drive assembly is configured to be driven by the first and second moveable drive members for linear motion along an axis substantially parallel to the first and second longitudinal axes, and rotation about an axis of rotation. A position of each of the moveable drive members is separately controllable to control rotational and linear positions of the drive assembly.