发明名称 METHODS FOR FORMING SUPERCONDUCTING CONDUCTORS
摘要 <p>A method for producing a superconducting conductor is disclosed, including providing a substrate, depositing a buffer film having a biaxial texture to overlie the substrate by reactive sputtering, and depositing a superconducting layer to overlie the buffer film. Deposition of the buffer film is carried out by exposing the substrate along a deposition zone to a material plume generated by bombarding a target in the presence of a magnetic field, the deposition zone having a length of at least 1.0m. The assist ions may be generated from a gridless ion source. The buffer film may have a biaxial texture having an out-of-plane crystallographic texture represented by a mosaic spread of not greater than 30°.</p>
申请公布号 WO2006036547(A2) 申请公布日期 2006.04.06
申请号 WO2005US32677 申请日期 2005.09.14
申请人 SUPERPOWER, INC. 发明人 SELVAMANICKAM, VENKAT
分类号 C23C14/00;C23C14/32 主分类号 C23C14/00
代理机构 代理人
主权项
地址