| 摘要 |
PROBLEM TO BE SOLVED: To provide a high voltage pulse power supply in which high stability of load output can be realized without increasing the capacity of an energy storage capacitor. SOLUTION: In order to apply a voltage to a load for a predetermined time, semiconductor elements of a second semiconductor switch 7 where a plurality of circuits each consisting of a semiconductor element and a resistor connected in series with a first semiconductor switch 5 are connected in series are turned on sequentially. The voltage being applied to the load is controlled to a constant level by varying the combined resistance of resistors connected in parallel with the load and the semiconductor switch 7 thus realizing high stability of load output. COPYRIGHT: (C)2006,JPO&NCIPI
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