发明名称 Double-electret mems actuator
摘要 An actuator ( 100 ) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator ( 100 ) may include a first conductive layer ( 102 ) residing on a first electret layer ( 101 ). The actuator ( 100 ) may further include a moveable second electret layer ( 103 ) which is spaced apart in relation to the first conductive layer ( 102 ) when the second electret layer ( 103 ) is in a quiescent state. The actuator ( 100 ) may further include a second conductive layer ( 104 ) in a spaced apart relation to the second electret layer ( 103 ) when the second electret layer (103) is in the quiescent state. The actuator ( 100 ) may further include a voltage source ( 105 ) configured to selectively apply a voltage between the first ( 102 ) and second ( 104 ) conductive layers thereby propelling the second electret layer ( 103 ) to either the first ( 102 ) or second ( 104 ) conductive layer.
申请公布号 US2006066934(A1) 申请公布日期 2006.03.30
申请号 US20050506653 申请日期 2005.09.26
申请人 UNI-PIXEL DISPLAYS, INC. 发明人 SELBREDE MARTIN G.
分类号 G02B26/00;B81B3/00;H01H59/00;H02N1/00 主分类号 G02B26/00
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