CHEMICAL VAPORIZING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a chemicals vaporizing device further exhibiting excellent vaporizing effect over a long period by adding a vaporizing performance attained by the generation of turbulent flow on the upper surface of a chemicals-supporting member in addition to the vaporizing performance based on centrifugal force. SOLUTION: This chemicals vaporizing device is provided with the chemicals-supporting member 2 capable of holding chemicals interposing an air-passable gap in rotation, a rotor 1 placed in all area or a part of area from the inside of the rotation center to the outer circumference above the chemicals-supporting member 2 and close to or contacting with the upper surface of the chemicals-supporting member and having a member 3 with a definite vertical width and capable of changing the direction of air flow on the upper surface, and a rotation drive apparatus for the rotor 1. COPYRIGHT: (C)2006,JPO&NCIPI