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发明名称
Trägerplatte mit Substratdetektor
摘要
申请公布号
DE60017678(T2)
申请公布日期
2006.03.23
申请号
DE20006017678T
申请日期
2000.11.15
申请人
APPLIED MATERIALS, INC.
发明人
CHEN, HUNG CHIH;TSENG, MING-KUEI MICHAEL;ZUNIGA, STEVEN
分类号
B24B47/22;B24B49/00;B25J15/06;H01L21/304;H01L21/306
主分类号
B24B47/22
代理机构
代理人
主权项
地址
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