| 摘要 |
A capacitive sensor provides a high level of precision (potentially accurate within fractions of a nanometer) by taking the effects of environmental changes into consideration and compensating for any and all changes to the plate area and to the value of the dielectric constant before determining an accurate measurement. Such compensation can be achieved through use of a plurality of environmental sensors to mathematically calculate the change according to the variant conditions surrounding the capacitive sensor. Preferably, however, the compensation would be made through the use of a reference capacitor with a fixed gap between the plates but that is otherwise identical in both form and reaction to environmental changes as the capacitive sensor that it monitors in order to compensate for all environmental parameters other than the parameter of interest.
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