| 摘要 |
PROBLEM TO BE SOLVED: To prevent loss of a wafer by checking consistency of a recipe before the recipe is implemented and suppressing implementation of an illegal recipe. SOLUTION: In a substrate processing device equipped with a main control unit 13 which performs substrate processing by implementing a recipe comprising a plurality of steps, the main control unit acquires jump information of each step of the recipe, and judges whether steps have the same jump destination in the same recipe to judge whether the recipe is consistent. COPYRIGHT: (C)2006,JPO&NCIPI
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