| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater for bonding having a long survice life and allowing prevention of deformation or damage on a heater and degradation by oxidation and reduction of ununiformity of the temperature distribution on the surface of the heater in cooling. SOLUTION: This heater 1 for bonding made of ceramic base material has a heater 14 in which a heating element 12 is embedded and a holder 15 coupling the heater 14 with another member. The ceramic base material 2 and a heating element 12 are integrated by integrally sintering the ceramic base material 2 and the heating element 12. The heating element 12 of at least more than two layers are embedded in the heater 14.
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