| 摘要 |
PROBLEM TO BE SOLVED: To provide a detector-rotation type surface properties measuring apparatus which performs signal transmission between the fixed side and the rotation side in a noncontact manner. SOLUTION: The surface properties/condition measuring apparatus (10) comprises: a displacement sensing means (18) which is mounted on the rotation sides (14, 16) performing rotational motion with respect to the fixed side (12) in a noncontact manner to detect displacement information by irregularities on a surface of an object to be measured; a light waves interference means (20) which is mounted on the fixes side (12), divides light from a light source (22) into measuring light and reference light, sends the measuring light to the displacement detection means, and allows displacement measuring light which has acquired displacement information as a change in optical path length and the reference light to interfere with each other to acquire optical path length information; and a light guiding path which is mounted on the rotation sides (14, 16) to function as a path for light connecting the displacement sensing means and the light waves interference means. The measuring light from the light waves interference means is guided to the displacement sensing means through the light guiding path and is converted by the displacement sensing means into the displacement measuring light which has acquired the displacement information. The displacement measuring light returns again to the light waves interference means through the light guiding path, wherein interference fringes information is sensed to acquire the displacement information. COPYRIGHT: (C)2006,JPO&NCIPI
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