| 摘要 |
PROBLEM TO BE SOLVED: To always accurately and quickly measure the thickness of a plate being a measuring object, irrespective of the material quality, hardness, and the area of the plate. SOLUTION: The thickness of the transparent plate is calculated on the basis of the relation between thickness and spherical aberration in a reference basal plate, by using the spherical aberration component of an interference fringe to be obtained by light reflected by a reference face, and light reflected by the rear face of the transparent plate arranged at a predetermined position after permeating the reference face and having permeated the reference face again. COPYRIGHT: (C)2006,JPO&NCIPI
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