发明名称 |
Specimen preparation method for preparing a specimen for electron microscope examinations places a specimen with a substrate in a vacuum chamber to apply a coating and ion beam |
摘要 |
A specimen containing a substrate (10) is placed in a vacuum chamber (32) for its preparation. A protective coating (21) is applied to a carrier surface for the specimen, which, when under the protective coating, is separated from the substrate by an ion beam (19). - Independent claims are also included for the following: - (A) A transmission electron microscope specimen carrier; - (B) and for a holder with two micro-mechanical tong elements; - (C) and for a glass capillary vessel in tension.
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申请公布号 |
DE10344643(B4) |
申请公布日期 |
2006.03.02 |
申请号 |
DE20031044643 |
申请日期 |
2003.09.17 |
申请人 |
CARL ZEISS NTS GMBH |
发明人 |
BURKHARDT, CLAUS;NISCH, WILFRIED |
分类号 |
G01N1/28;G01N1/32;G01N1/44 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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