发明名称 Specimen preparation method for preparing a specimen for electron microscope examinations places a specimen with a substrate in a vacuum chamber to apply a coating and ion beam
摘要 A specimen containing a substrate (10) is placed in a vacuum chamber (32) for its preparation. A protective coating (21) is applied to a carrier surface for the specimen, which, when under the protective coating, is separated from the substrate by an ion beam (19). - Independent claims are also included for the following: - (A) A transmission electron microscope specimen carrier; - (B) and for a holder with two micro-mechanical tong elements; - (C) and for a glass capillary vessel in tension.
申请公布号 DE10344643(B4) 申请公布日期 2006.03.02
申请号 DE20031044643 申请日期 2003.09.17
申请人 CARL ZEISS NTS GMBH 发明人 BURKHARDT, CLAUS;NISCH, WILFRIED
分类号 G01N1/28;G01N1/32;G01N1/44 主分类号 G01N1/28
代理机构 代理人
主权项
地址