发明名称 |
Workpiece dividing method utilizing laser beam |
摘要 |
<p>A workpiece dividing method comprising applying a laser beam from one surface side of a workpiece permeable to the laser beam. The laser beam applied from the one surface side of the workpiece is focused onto the other surface of the workpiece or its vicinity to deteriorate a region ranging from the other surface of the workpiece to a predetermined depth. The deterioration of the workpiece is substantially melting and resolidification.</p> |
申请公布号 |
SG119217(A1) |
申请公布日期 |
2006.02.28 |
申请号 |
SG20040002732 |
申请日期 |
2004.05.18 |
申请人 |
DISCO CORPORATION |
发明人 |
YUSUKE NAGAI;SATOSHI KOBAYASHI;HITOSHI HOSHINO |
分类号 |
B23K26/00;B23K26/04;B23K26/40;B23K101/40;C03B33/023;C03B33/07;C03B33/10;H01L21/301;(IPC1-7):B23K26/02 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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