发明名称 Bipolar transistor and method of producing same
摘要 In a method of producing a bipolar transistor, a semiconductor substrate having a substrate surface is provided. A base-terminal layer for providing a base terminal is formed on the substrate surface, and an emitter window having a wall area is formed in the base-terminal layer. A first spacing layer is formed on the wall area of the emitter contact window, and a recess is etched into the substrate within a window specified by the first spacing layer. A base layer contacted by outdiffusion from the base-terminal layer is formed in the recess of the emitter window, and a second spacing layer is formed on the first spacing layer and on the base layer. The second spacing layer is structured for the purpose of specifying a planar terminal pad on the base layer, and an emitter layer is formed on the planar terminal pad.
申请公布号 US7005723(B2) 申请公布日期 2006.02.28
申请号 US20040764264 申请日期 2004.01.23
申请人 INFINEON TECHNOLOGIES AG 发明人 TILKE ARMIN;SCHUPKE KRISTIN
分类号 H01L27/082;H01L21/331;H01L29/08;H01L29/417;H01L29/737 主分类号 H01L27/082
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