发明名称 Method for manufacturing semiconductor device
摘要 Disclosed is a method for manufacturing a semiconductor device. The method comprises the steps of: providing a first substrate and a second substrate; forming a capacitor and a gate line on a first surface of the first substrate; forming an insulating layer on a resultant structure of the first substrate; bonding the second substrate to the insulating layer of the first substrate; turning a resultant structure over in such a manner that a second surface of the first substrate is an upper surface of the resultant structure; polishing the second surface of the first substrate by a predetermined thickness; forming an isolation layer for defining an active region by performing an isolation process with respect to the second surface of the first substrate for which a polishing process is finished; and forming a bit line on the active region in the first substrate.
申请公布号 US7005329(B2) 申请公布日期 2006.02.28
申请号 US20040889919 申请日期 2004.07.13
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SHIN YONG CHUL
分类号 H01L21/00;H01L21/336;H01L21/8242 主分类号 H01L21/00
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