| 摘要 |
PROBLEM TO BE SOLVED: To provide an attracting device capable of attracting an insulating substrate. SOLUTION: On a substrate 10 with an insulated surface, a first electrode 11 and a second electrode 12 are provided so that the electrodes are exposed. An insulating substrate 7 is positioned so that it is in contact with or very close to the surfaces of the first electrode 11 and the second electrode 12. Because an electric field with a large spatial rate of change is created between the first electrode 11 and the second electrode 12, the substrate 7 is attracted to the surface of an attracting device 1 by gradient force. Because the magnitude of gradient force depends on the spatial rate of change of the electric field, it is preferable to apply voltage between the first electrode 11 and the second electrode 12 so as to create an electric field of 1.0×10<SP>6</SP>V/m or more. COPYRIGHT: (C)2006,JPO&NCIPI |
