| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface adsorbate measuring method which enables the measurement of only the surface adsorbed matter of the sensor part of a gas sensor, and a measuring instrument therefor. SOLUTION: The main body of the gas sensor 23 for detecting the presence of a gas to be sensed is housed in a vacuum chamber 20 and a current is passed through the Pt membrane heater 27 provided in the vicinity of the sensor part 24 of the gas sensor 23 by the power supply provided in the vacuum chamber 20 to heat only the sensor part 24 to raise its temperature while only the adsorbate of the sensor part 24 is gasified to be guided to a mass analyzer 26 to be analyzed. By this constitution, since the separated gas from the main body of the gas sensor 23 other than the sensor part 24 is not produced and only the separated gas from the surface of the sensor part 24 can be measured, only the adsorbate on the sensor part 24 of the gas sensor 23 can be measured. COPYRIGHT: (C)2006,JPO&NCIPI
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