发明名称 MANUFACTURING METHOD AND APPARATUS FOR SUBSTRATE, IMAGE DISPLAY APPARATUS, AND MANUFACTURING METHOD FOR SAME
摘要 PROBLEM TO BE SOLVED: To provide a flat panel display having excellent characteristics causing little discharge. SOLUTION: A method is used for cleaning an image display apparatus where a conductive substrate 1002 and a conductive plate-like member 1001 having a polarity reverse to that of the conductive substrate 1002 are disposed oppositely to each other and a space surrounded by the substrate 1002 and the plate-like member 1001 is brought into a vacuum state. The method includes: a step of applying a voltage between the substrate 1002 and the plate-like member 1001; and a step of introducing conductive particles into the space between the substrate 1002 and the plate-like member 1001 under the voltage application. The voltage applied between the substrate 1002 and the plate-like member 1001 causes the introduced conductive particles to reciprocate between the substrate 1002 and the plate-like member 1001 and to collide with impurities attached to the substrate 1002 or the plate-like member 1001, thereby removing the impurities from the substrate 1002 or the plate-like member 1001. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006049281(A) 申请公布日期 2006.02.16
申请号 JP20050169454 申请日期 2005.06.09
申请人 CANON INC 发明人 ONISHI TOMOYA
分类号 H01J9/38;H01J31/12 主分类号 H01J9/38
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