| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet device which can be driven by a low voltage by increasing the area of a piezoelectric film while using a piezoelectric film having insufficient piezoelectric characteristics and which permits dense arrangement of jet channels, and a manufacturing method therefor. SOLUTION: A plurality of jet channels 130 are arranged, separated by vibrating plates 120 on a board 110. Driving electrode films 152, piezoelectric films 140 made of a lead zirconate titanate (PZT)-based ceramic material, and common electrode films 150 are formed on the inside surface of the jet channels 130. The piezoelectric film 140 is polarized in the direction (arrow P) from the driving electrode film 152 to the common electrode film 150. The application of voltage between the driving electrode film 152 and the common electrode film 150 makes the piezoelectric film 140 areally contract and bends the vibrating plate 120. When the vibrating plate 120 returns, pressure is applied to an ink in the jet channels 130 and jets the ink. COPYRIGHT: (C)2006,JPO&NCIPI
|
