发明名称 Illumination system having a more efficient collector optic
摘要 An illumination system having a light source is disclosed, the light source having a source size and emitting radiant power in a spatial angle element Omega(alpha), alpha indicating the aperture angle, a collector, which collects radiant power from the source up to a first maximum aperture angle alpha<SUB>max(1)</SUB>, a first geometric flux G 1 being defined by the source size Q and the first maximum aperture angle alpha<SUB>max(1)</SUB>, a plane to be illuminated having an area A and a numerical aperture NA to be illuminated, the numerical aperture NA to be illuminated defining a second aperture angle alpha<SUB>(2)</SUB>, and a second geometric flux G 2 being defined by the area A and the second aperture angle alpha<SUB>(2)</SUB>, distinguished in that the collector has a first maximum aperture angle alpha<SUB>max(1)</SUB>, which is selected in such a way that the first geometric flux G 1 is equal to or larger than, particular preferably more than 15% larger than the second geometric flux G 2.
申请公布号 US2006033895(A1) 申请公布日期 2006.02.16
申请号 US20050155213 申请日期 2005.06.17
申请人 CARL ZEISS SMT AG 发明人 SINGER WOLFGANG
分类号 G03B27/42;G02B27/00;G03F7/20 主分类号 G03B27/42
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