| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jet head which can surely prevent defective ejection such as clogging of a nozzle with foreign matter, and to provide a liquid jet head. SOLUTION: The manufacturing method comprises a process of forming a piezoelectric element on a passage formation substrate and also forming a diaphragm removed part by removing a diaphragm of a region which becomes a communication part, a process of forming an insulating film by covering at least a region opposed to the diaphragm removed part and of also forming a through hole in the insulating film, a process of sealing the through hole by forming a metal layer via an adhesion layer on the passage formation substrate and of also forming a lead electrode by patterning the adhesion layer and the metal layer, a process of joining a reservoir formation substrate to the passage formation substrate, a process of forming the communication part by wet etching the passage formation substrate, a process of removing the adhesion layer and the metal layer of a region corresponding to the through hole by wet etching, a process of forming a reservoir by removing an eaves part by dry etching, and a process of forming a protecting film to an inner face of a passage which includes the reservoir. COPYRIGHT: (C)2006,JPO&NCIPI
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