| 摘要 |
<p>A ceramics member (10) having an oxidation resistance property and a metal member (8) are joined via a joint layer (12). An embedded member (5) is exposed to a joint surface of the ceramics member and is contacted with the joint layer to join the ceramics member via the joint layer to the metal member. The embedded member (5) is at least partly of molybdenum. The joint layer (12) is mainly made of one or more metal selected from the group consisting of gold, platinum and palladium. Insulation defects due to corrosion of the embedded member, or leaching of a low melting point compound are avoided. The product is useful as an electrostatic chuck in semiconductor manufacture. <IMAGE></p> |
